LAM

716-011654-080 | KAPTON FILM LOWER ELECTRODE C

LAM

716-011746-161 | PLT,WFR CLMP 6".025DM RCD HGT

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716-011750-161 | RING, INSERT, 6.00" MAJOR ONLY

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716-011751-001 | PLATE, WAFER-CLAMP,INSERT CARR

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716-011758-016 | RING, EDGE FOCUS, ORIFICE, 6.0

LAM

716-011759-015 | RING, EDGE FOCUS, W/PINS, 5.00

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716-011766-016 | RING,EDGE FOCUS ORFICE,COMBO

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716-011775-168 | PLATE,W/C 6" JEIDA CLAMP

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716-011830-001 | FOCUS RING, 4" (ALUMINA) W/C

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716-011908-334 | BULLEN BOND & DE-BONDED 200MM ELECTRODE

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716-011935-001 | WELL THERMOCOUPLE

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716-011963-003 | PLATE,W/C,ATTACHMENT(INTR.BLW)

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716-011981-001 | PLUNGER, WAFER CLAMP, LOWER

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716-011999-281 | PLATE, LWR WAFER CLAMP, 8"

LAM

716-012236-001 | BUMPER, SHAFT, INNER-GATE