LAM

716-028028-005 | R ELCTD CLP(6"ELCTD)W/O CONF R

LAM

716-028028-007 | RING,ELECTRODE CLAMP,12 BOLT

LAM

716-028028-008 | RING ELECTRODE CLAMP 6" ELECT.

LAM

716-028249-004 | RING,FOCUS,6" ESC

LAM

716-028249-064 | R,FOC,SEMI,6" ESC

LAM

716-028249-361 | RING,FOCUS,JEIDA,6"",GR,ESC

LAM

716-028396-001 | RING EDGE 8" SHROUD

LAM

716-028415-016 | RING FOCUS WITH PINS

LAM

716-028419-001 | CLAMP WAFER 4"

LAM

716-028454-015 | DISK,QUARTZ

LAM

716-028454-512 | DISK, QUARTZ

LAM

716-028454-716 | UNKNOWN DESCRIPTION

LAM

716-028492-001 | SLEEVE, CERAMIC THERMAL PROBE

LAM

716-028668-241 | PLT,TOP WFR CLP DMD SHADOW

LAM

716-028668-242 | PLT,WFR CLMP,SHDW, 2.25MIL 4"