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716-011563-145 | PLATE, W/C 4" DOMED

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716-011563-152 | 5" DOMED W/C (1.5MM COV W/PINS

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716-011563-168 | DOMED WAFER CLAMP 6" JEIDA STD

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716-011563-266 | PLATE, W/C 6" DOMED

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716-011563-268 | PLATE WAFER CLAMP 6 IN

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716-011563-288 | PLT, WFR CLAMP, 8" DOMED

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716-011570-001 | ORIFICE FILLER, W/C, CERAMIC

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716-011580-145 | PLATE, W/C 4.00"", 90 & 270 DEG

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716-011580-162 | PLATE, WAFER CLAMP, 6"

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716-011624-001 | RING INSULATOR-LOWER ELECTROD

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716-011624-006 | R,INS,LWR ELCTD,RDCD HGT,L CAP

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716-011638-004 | RING, FOCUS, THIN EDGE, 4

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716-011651-006 | RING, EDGE, WAFER CLAMP, 6.00"

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716-011652-008 | KAPTON FILM LOWER ELECTRODE C

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716-011653-001 | KAPTON FILM WAFER CLAMP (.002