LAM

715-011532-001 | PLATE SEAL UPPER ELECTRODE

LAM

715-011532-011 | ELECTRODE ALUMINUM ANODIZED

LAM

715-011532-012 | ELECTRODE ALUM

LAM

715-011559-152 | PLATE,WAFER CLAMP

LAM

715-011559-261 | PLATE,WAFER CLAMP

LAM

715-011565-001 | BOLT CLAMP RETAINING

LAM

715-011611-001 | BODY STOP

LAM

715-011612-001 | NUT ADJUSTABLE

LAM

715-011612-002 | NUT ADJUSTABLE

LAM

715-011622-001 | LIFTER WAFER 4-PIN (Non-Flex)

LAM

715-011626-001 | RING COOLING LOWER ELECTRODE

LAM

715-011628-001 | DIVIDER FLOW

LAM

715-011640-006 | RING FOCUS ANODIZED (SEMI 6"

LAM

715-011640-008 | RING FOCUS ANODIZED (SEMI 8"

LAM

715-011664-006 | CAP,LOWER ELECTRODE